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1

Germanium Incorporation in Silicon Carbide Epitaxial Layers Using Molecular Beam Epitaxy on 4H-SiC Substrates

Pezoldt, Jörg, Zgheib, Charbel, Stauden, Thomas, Ecke, Gernot, Kups, Thomas, Jacobs, Heiko O., Weih, Petia

Journal:

Materials Science Forum

Year:

2019

File:

PDF, 1.05 MB

2019

2

Real time spectroscopic ellipsometry monitoring of the SiC growth during the interaction process of elemental carbon with Si surfaces

T. Wöhner, V. Cimalla, Th. Stauden, J.A. Schaefer, J. Pezoldt

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 306 KB

english, 2000

3

Chemical conversion of Si to SiC by solid source MBE and RTCVD

Pezoldt, J., Cimalla, V., Stauden, Th., Ecke, G., Eichhorn, G., Scharmann, F., Schipanski, D.

Journal:

Diamond and Related Materials

Year:

1997

Language:

english

File:

PDF, 1.32 MB

english, 1997

4

The deposition of aluminum nitride on silicon by plasma-enhanced metal-organic chemical vapour deposition

Stauden, Th., Eichhorn, G., Cimalla, V., Pezoldt, J., Ecke, G.

Journal:

Diamond and Related Materials

Year:

1996

Language:

english

File:

PDF, 305 KB

english, 1996

5

Approaching Roll-to-Roll Fluidic Self-Assembly: Relevant Parameters, Machine Design, and Applications

Park, Se-Chul, Fang, Jun, Biswas, Shantonu, Mozafari, Mahsa, Stauden, Thomas, Jacobs, Heiko O.

Journal:

Journal of Microelectromechanical Systems

Year:

2015

Language:

english

File:

PDF, 1.87 MB

english, 2015

6

Surface Tension Directed Fluidic Self-Assembly of Semiconductor Chips across Length Scales and Material Boundaries

Biswas, Shantonu, Mozafari, Mahsa, Stauden, Thomas, Jacobs, Heiko

Journal:

Year:

2016

Language:

english

File:

PDF, 3.34 MB

english, 2016

7

Stress-adaptive meander track for stretchable electronics

Biswas, Shantonu, Reiprich, Johannes, Pezoldt, Joerg, Hein, Matthias, Stauden, Thomas, Jacobs, Heiko

Journal:

Flexible and Printed Electronics

Year:

2018

Language:

english

File:

PDF, 1.09 MB

english, 2018

8

Core–Shell Transformation-Imprinted Solder Bumps Enabling Low-Temperature Fluidic Self-Assembly and Self-Alignment of Chips and High Melting Point Interconnects

Kaltwasser, Mahsa, Schmidt, Udo, Biswas, Shantonu, Reiprich, Johannes, Schlag, Leslie, Isaac, Nishchay Angel, Stauden, Thomas, Jacobs, Heiko O.

Journal:

ACS Applied Materials & Interfaces

Year:

2018

Language:

english

File:

PDF, 3.03 MB

english, 2018

9

Elasticity-Based Approach of Interfaces: Application to Heteroepitaxy and Hetero-Systems

P. Masri, Th. Stauden, J. Pezoldt, M. Averous

Journal:

physica status solidi (a)

Year:

2001

Language:

english

File:

PDF, 320 KB

english, 2001

10

Simulation of quality of SiC/Si interface during MBE deposition of C on Si

D. V. Kulikov, A. A. Schmidt, S. A. Korolev, F. M. Morales, Th. Stauden, Yu. V. Trushin, J. Pezoldt

Journal:

Materialwissenschaft und Werkstofftechnik

Year:

2006

Language:

english

File:

PDF, 112 KB

english, 2006

11

Reactively sputtered InxVyOz films for detection of NOx, D2, and O2

M. Ali, V. Cimalla, V. Lebedev, Th. Stauden, Ch. Wang, G. Ecke, V. Tilak, P. Sandvik, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 213 KB

english, 2007

12

NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Ch.Y. Wang, M. Ali, Th. Kups, C.-C. Röhlig, V. Cimalla, Th. Stauden, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2008

Language:

english

File:

PDF, 491 KB

english, 2008

13

Investigation of the nucleation and growth of SiC nanostructures on Si

F. Scharmann, P. Maslarski, W. Attenberger, J.K.N. Lindner, B. Stritzker, Th. Stauden, J. Pezoldt

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 1.16 MB

english, 2000

14

Deposition of aluminium nitride films by electron cyclotron resonance plasma-enhanced chemical vapour deposition

G. Ecke, G. Eichhorn, J. Pezoldt, C. Reinhold, T. Stauden, F. Supplieth

Journal:

Surface and Coatings Technology

Year:

1998

Language:

english

File:

PDF, 616 KB

english, 1998

15

Influence of the heating ramp on the heteroepitaxial growth of SiC on Si

V Cimalla, Th Stauden, G Eichhorn, J Pezoldt

Journal:

Materials Science and Engineering: B

Year:

1999

Language:

english

File:

PDF, 3.55 MB

english, 1999

16

Ion beam synthesis of 3C–(Si1–xC1–y)Gex+y solid solutions

P. Weih, Th. Stauden, G. Ecke, S. Shokhovets, Ch. Zgheib, M. Voelskow, W. Skorupa, O. Ambacher, J. Pezoldt

Journal:

physica status solidi (a)

Year:

2005

Language:

english

File:

PDF, 123 KB

english, 2005

17

Stress and stress monitoring in SiC–Si heterostructures

Jörg Pezoldt, Richard Nader, Florentina Niebelschütz, Volker Cimalla, Thomas Stauden, Charbel Zgheib, Pierre Masri

Journal:

physica status solidi (a)

Year:

2008

Language:

english

File:

PDF, 287 KB

english, 2008

18

Micro- and nano-electromechanical resonators based on SiC and group III-nitrides for sensor applications

K. Brueckner, F. Niebelschuetz, K. Tonisch, Ch. Foerster, V. Cimalla, R. Stephan, J. Pezoldt, T. Stauden, O. Ambacher, M. A. Hein

Journal:

physica status solidi (a)

Year:

2011

Language:

english

File:

PDF, 1.38 MB

english, 2011

19

Rapid Thermal Annealing of Thin ZnO Films

O. Nennewitz, H. Schmidt, J. Pezoldt, Th. Stauden, J. Schawohl, L. Spiess

Journal:

physica status solidi (a)

Year:

1994

Language:

english

File:

PDF, 356 KB

english, 1994

20

The role of Ge predeposition temperature in the MBE epitaxy of SiC on Ssilicon

F. M. Morales, Ch. Zgheib, S. I. Molina, D. Araújo, R. García, C. Fernández, A. Sanz-Hervás, P. Masri, P. Weih, Th. Stauden, V. Cimalla, O. Ambacher, J. Pezoldt

Journal:

physica status solidi (c)

Year:

2004

Language:

english

File:

PDF, 428 KB

english, 2004

21

3C-SiC:Ge alloys grown on Si (111) substrates by SSMBE

P. Weih, V. Cimalla, Th. Stauden, R. Kosiba, G. Ecke, L. Spiess, H. Romanus, M. Gubisch, W. Bock, Th. Freitag, P. Fricke, O. Ambacher, J. Pezoldt

Journal:

physica status solidi (c)

Year:

2004

Language:

english

File:

PDF, 214 KB

english, 2004

22

Lateral alignment of SiC dots on Si

V. Cimalla, J. Pezoldt, Th. Stauden, A.A. Schmidt, K. Zekentes, O. Ambacher

Journal:

physica status solidi (c)

Year:

2004

Language:

english

File:

PDF, 139 KB

english, 2004

23

Investigation of the interface manipulation in SiC(100) on Si(100) with isovalent impurities

J. Pezoldt, F. M. Morales, Ch. Zgheib, Ch. Förster, Th. Stauden, G. Ecke, Ch. Wang, P. Masri

Journal:

Surface and Interface Analysis

Year:

2006

Language:

english

File:

PDF, 204 KB

english, 2006

24

Spectroscopic investigations of the role of Ge in modifying the Si to SiC conversion process

Jörg Pezoldt, Richard Nader, Charbel Zgheib, Gernot Ecke, Ralph Pieterwas, Thomas Stauden, Thomas Wöhner, Pierre Masri

Journal:

Surface and Interface Analysis

Year:

2008

Language:

english

File:

PDF, 164 KB

english, 2008

25

Surface morphology of Ge-modified 3C-SiC/Si films

Richard Nader, Michel Kazan, Elie Moussaed, Thomas Stauden, Merten Niebelschütz, Pierre Masri, Jörg Pezoldt

Journal:

Surface and Interface Analysis

Year:

2008

Language:

english

File:

PDF, 292 KB

english, 2008

26

Auger investigations of thin SiC films

G. Ecke, H. Rößler, V. Cimalla, J. Pezoldt, T. Stauden

Journal:

Analytical and Bioanalytical Chemistry

Year:

1998

Language:

english

File:

PDF, 232 KB

english, 1998

27

Polarity determination and control of SiC grown on Si

Jörg Pezoldt, Thomas Kups, Thomas Stauden, Bernd Schröter

Journal:

Materials Science and Engineering: B

Year:

2009

Language:

english

File:

PDF, 522 KB

english, 2009

28

SiC-based FET for detection of NOx and O2 using InSnOx as a gate material

M. Ali, V. Cimalla, V. Lebedev, Th. Stauden, G. Ecke, V. Tilak, P. Sandvik, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2007

Language:

english

File:

PDF, 241 KB

english, 2007

29

NOx sensing properties of In2O3 thin films grown by MOCVD

M. Ali, Ch.Y. Wang, C.-C. Röhlig, V. Cimalla, Th. Stauden, O. Ambacher

Journal:

Sensors and Actuators B: Chemical

Year:

2008

Language:

english

File:

PDF, 315 KB

english, 2008

30

Investigation of Ge and C layer deposition on a Si substrate using SIMS profiling

V. S. Kharlamov, D. V. Kulikov, Yu. V. Trushin, P. Nader, P. Mazri, Th. Stauden, J. Pezoldt

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2010

Language:

english

File:

PDF, 193 KB

english, 2010

31

Schichten über Schichten : Innovative Beschichtungen für komplexe Anwendungen

Peter Schaaf, Lothar Spieß, Thomas Kups, Henry Romanus, Rolf Grieseler, Marcus Hopfeld, Marcus Wilke, Thomas Stauden, David Lorenz, Andreas Fischer

Journal:

Vakuum in Forschung und Praxis

Year:

2011

Language:

german

File:

PDF, 1.22 MB

german, 2011

32

Die Reninkonzentration im Plasma und Harn von Patienten mit und ohne pathologische Proteinurie

W. Oelkers, W. Glaser, M. v. Stauden

Journal:

Journal of Molecular Medicine

Year:

1968

Language:

german

File:

PDF, 1.06 MB

german, 1968

33

In situ spectroscopic ellipsometry of hydrogen-argon plasma cleaned silicon surfaces

Ch. Förster, F. Schnabel, P. Weih, Th. Stauden, O. Ambacher, J. Pezoldt

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 485 KB

english, 2004

34

Integration of In[sub 2]O[sub 3] nanoparticle based ozone sensors with GaInNâGaN light emitting diodes

Wang, Ch. Y., Cimalla, V., Kups, Th., RoÌhlig, C.-C., Stauden, Th., Ambacher, O., Kunzer, M., Passow, T., Schirmacher, W., Pletschen, W., KoÌhler, K., Wagner, J.

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 720 KB

english, 2007

35

Isotropic Etching of SiC

Stauden, Thomas, Niebelschütz, Florentina, Tonisch, Katja, Cimalla, Volker, Ecke, Gernot, Haupt, Christian, Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2009

Language:

english

File:

PDF, 580 KB

english, 2009

36

Growth of cubic GaN on 3C–SiC/Si (001) nanostructures

Kemper, R.M., Hiller, L., Stauden, T., Pezoldt, J., Duschik, K., Niendorf, T., Maier, H.J., Meertens, D., Tillmann, K., As, D.J., Lindner, J.K.N.

Journal:

Journal of Crystal Growth

Year:

2013

Language:

english

File:

PDF, 3.56 MB

english, 2013

37

[IEEE 2008 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) - Sydney, Australia (2008.07.28-2008.08.1)] 2008 Conference on Optoelectronic and Microelectronic Materials and Devices - Isotropic dry-etching of SiC for AlGaN/GaN MEMS fabrication

Niebelschutz, F., Pezoldt, J., Stauden, T., Cimalla, V., Tonisch, K., Bruckner, K., Hein, M., Ambacher, O., Schober, A.

Year:

2008

Language:

english

File:

PDF, 199 KB

english, 2008

38

[IEEE 2006 5th IEEE Conference on Sensors - Daegu (2006.10.22-2006.10.25)] 2006 5th IEEE Conference on Sensors - A new type of highly sensitive portable ozone sensor operating at room temperature

Wang, C.Y., Cimalla, V., Roehlig, C.-C., Stauden, T., Niebelschuetz, F., Ambacher, O., Kiesewetter, O., Kittelmann, S.

Year:

2006

Language:

english

File:

PDF, 3.91 MB

english, 2006

39

A First Implementation of an Automated Reel-to-Reel Fluidic Self-Assembly Machine

Park, Se-Chul, Fang, Jun, Biswas, Shantonu, Mozafari, Mahsa, Stauden, Thomas, Jacobs, Heiko O.

Journal:

Advanced Materials

Year:

2014

Language:

english

File:

PDF, 1.29 MB

english, 2014

40

Phase selective growth and properties of rhombohedral and cubic indium oxide

Wang, Ch. Y., Cimalla, V., Romanus, H., Kups, Th., Ecke, G., Stauden, Th., Ali, M., Lebedev, V., Pezoldt, J., Ambacher, O.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 612 KB

english, 2006

41

Cubic GaN/AlN multi-quantum wells grown on pre-patterned 3C-SiC/Si (001)

Kemper, R. M., Mietze, C., Hiller, L., Stauden, T., Pezoldt, J., Meertens, D., Luysberg, M., As, D. J., Lindner, J. K. N.

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 3.60 MB

english, 2014

42

Self-Assembly: A First Implementation of an Automated Reel-to-Reel Fluidic Self-Assembly Machine (Adv. Mater. 34/2014)

Park, Se-Chul, Fang, Jun, Biswas, Shantonu, Mozafari, Mahsa, Stauden, Thomas, Jacobs, Heiko O.

Journal:

Advanced Materials

Year:

2014

File:

PDF, 1.33 MB

2014

43

Localized Collection of Airborne Analytes: A Transport Driven Approach to Improve the Response Time of Existing Gas Sensor Designs

Fang, Jun, Park, Se-Chul, Schlag, Leslie, Stauden, Thomas, Pezoldt, Jörg, Jacobs, Heiko O.

Journal:

Advanced Functional Materials

Year:

2014

Language:

english

File:

PDF, 1.40 MB

english, 2014

44

The role of Si as surfactant and donor in molecular-beam epitaxy of AlN

Lebedev, V., Morales, F. M., Romanus, H., Krischok, S., Ecke, G., Cimalla, V., Himmerlich, M., Stauden, T., Cengher, D., Ambacher, O.

Journal:

Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 691 KB

english, 2005

45

Photoreduction and oxidation behavior of In[sub 2]O[sub 3] nanoparticles by metal organic chemical vapor deposition

Wang, Ch. Y., Cimalla, V., Kups, Th., Röhlig, C.-C., Romanus, H., Lebedev, V, Pezoldt, J., Stauden, Th., Ambacher, O.

Journal:

Journal of Applied Physics

Year:

2007

Language:

english

File:

PDF, 866 KB

english, 2007

46

Initial stages in the carbonization of (111)Si by solid-source molecular beam epitaxy

Cimalla, V., Stauden, Th., Ecke, G., Scharmann, F., Eichhorn, G., Pezoldt, J., Sloboshanin, S., Schaefer, J. A.

Journal:

Applied Physics Letters

Year:

1998

Language:

english

File:

PDF, 329 KB

english, 1998

47

Ge-modified Si(100) substrates for the growth of 3C-SiC(100)

Zgheib, Ch., McNeil, L. E., Masri, P., Förster, Ch., Morales, F. M., Stauden, Th., Ambacher, O., Pezoldt, J.

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 304 KB

english, 2006

48

In Situ Monitoring of the Effect of Ge on the SiC Growth on (111)Si Surfaces

Wöhner, T., Stauden, Thomas, Schaefer, J.A., Pezoldt, Jörg

Journal:

Materials Science Forum

Year:

2000

Language:

english

File:

PDF, 406 KB

english, 2000

49

The Influence of Ge on the SiC Nucleation on (111)Si Surfaces

Pezoldt, Jörg, Wöhner, T., Stauden, Thomas, Schaefer, J.A., Vida, György

Journal:

Materials Science Forum

Year:

2001

File:

PDF, 361 KB

2001

50

SiC-Based MOSFETs for Harsh Environment Emissions Sensors

Sandvik, Peter M., Ali, Majdeddin, Tilak, Vinayak, Matocha, Kevin, Stauden, Thomas, Tucker, Jesse B., Deluca, John, Ambacher, Oliver

Journal:

Materials Science Forum

Year:

2006

Language:

english

File:

PDF, 166 KB

english, 2006

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